Breakthrough progress of Zhongke Youwei deep ultraviolet LED equipment and process

Beijing Zhongke Youwei Technology Co., Ltd. (hereinafter referred to as “Zhongke Youwei”) is a high-tech enterprise established in February 2015 based on cooperation with the Institute of Semiconductors of the Chinese Academy of Sciences, focusing on deep ultraviolet (300nm or less) LEDs. Industrialization. For deep ultraviolet nitride epitaxial growth equipment, deep ultraviolet LED epitaxial process and device process, we provide customers with materials and devices that can fully utilize the performance of deep ultraviolet LEDs.

Recently, the company announced breakthroughs in deep UV UV equipment and processes.

It is reported that Zhongke Youwei has developed a 7-piece machine and a 48-piece model for deep-UV LEDs. The growth temperature is up to 1400 °C. The heating wire has a good life; the growth pressure is 30 torr continuously adjustable to normal pressure; The top plate realizes water-cooled spray-type uniform intake, and the uniformity is better than 1%. The finite element simulation simulates the thermal field and flow field to meet customer needs.

The basic process growth rate of the deep-UV LED base material AlN buffer layer was 1um/h, and the XRD rocking curve half-height width satisfying the deep-UV LED growth was obtained on the 7-chip machine and the 48-piece machine, and the (002) minimum was reached. 30 arc seconds, (102) has been less than 500 arc seconds.

The preliminary fabrication of the deep-UV LED near 280 nm has achieved electrical injection of light, and the luminous power is greater than 1 mw.

"From the current progress, we are expected to achieve material growth of deep-UV LEDs below 280nm on batch equipment, and combine the device process to achieve technological breakthroughs in large-scale deep-UV LEDs, reduce costs for deep-UV LEDs, and solve production equipment and complete sets of scale applications. The technical bottleneck of the process." Company executives told reporters.

At present, the ultraviolet LED light source is mainly used in the fields of ultraviolet light curing, anti-counterfeiting detection, medical illumination, fluorescence analysis, drug development, air and water purification.

"Future white goods will be a new field of application for deep ultraviolet LED disinfection. Refrigerators, washing machines, air conditioners, air purifiers, water dispensers, etc. all have the need to use small sterilizers, and major manufacturers are looking for suitable The product, UV LED has the characteristics of small size, convenient design, no pollution, etc. It is very suitable for application in white goods." Company executives told reporters.

"Zhongke Youwei will carry out the industrial production of deep ultraviolet UV LED epitaxial chips based on the current research and development and production technology of high temperature nitride MOCVD and the processing technology of deep ultraviolet LED epitaxial chips, by continuously increasing production and reducing The market price gradually opened up the application of the deep ultraviolet LED disinfection module in the field of white goods, expanding the company's market size," the executive said.

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